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SuperFab - UK Centre for Superconducting and Hybrid Quantum Systems (UK-CSQS)

SuperFab - UK Centre for Superconducting and Hybrid Quantum Systems (UK-CSQS)

SuperFab at Royal Holloway, University of London is a world-class university cleanroom and home of the UK Centre for Superconducting and Hybrid Quantum Systems (UK-CSQS).

SuperFab is owned and operated by the internationally renowned Department of Physics at Royal Holloway in association with the National Physical Laboratory (NPL) and JEOL as an open user facility serving academic and industrial interests.

It is dedicated to the development of quantum device technology through the application of fundamental phenomena based on superconductivity.

Opened in March 2019, SuperFab is a world-class nanofabrication facility specialising in superconducting electronics and quantum circuits. We offer academic and commercial access to state-of-the-art nanofabrication facilities specialising in superconducting and normal state metals, high resolution electron-beam lithography, specialist metal deposition systems and related services, including advanced expertise in condensed matter quantum technologies.

We invite expressions of interest from academic, industrial research projects and small & medium sized enterprises that could lead to new and unique types of ultra-sensitive sensing devices including access for industrial projects to assist with the commercialisation of quantum technology.

UK academics wanting to develop superconducting quantum devices have access free of access charges.

See below for how to contact us to discuss new proposals.

Our advanced clean room and nanofabrication facilities include:

  • JEOL JBX-8100FS, electron-beam lithography
  • Plassys e-beam metals deposition
  • Sputtering and etching
  • Optical lithography
  • Device characterisation
  • ISO class 5 cleanroom facility

We offer the following superconducting quantum technologies:

  • Qubit foundry
  • Hybrid devices and sensors
  • Artificial quantum systems
  • Quantum optics, quantum limited amplifiers and quantum metrology
  • Materials discovery and exploitation
  • Cryogenic and microwave measurement expertise

The Department of Physics at Royal Holloway has established world-leading expertise in superconducting nanophysics and nanotechnology. In recognition of this, the team, led by Prof Oleg AstafievProf Phil Meeson and Prof Alexander Tzalenchuk and including Prof Victor PetrashovDr Vladimir Antonov and Dr Rais Shaikhaidarov, were awarded funding for the creation of a new UK Centre for Superconducting and Hybrid Quantum Systems (UK-CSQS).

The UK-CSQS collaboration, with founder members Royal Holloway, the National Physical Laboratory (both Prof Astafiev and Prof Tzalenchuk hold joint appointments between the two institutions) and the Quantum Technology Centre at Lancaster University under co-director Prof Yuri Pashkin, has brought together the UK’s most experienced and well known scientists working on superconducting quantum technologies. The co-funding from the Engineering and Physical Sciences Research Council (EPSRC)NPL and JEOL, establishes Royal Holloway as the national centre for nanofabrication in the rapidly advancing field of superconducting quantum electronics.

Please contact us to discuss new proposals.


+44 (0)1784 414646 or +44 (0)1784 414968



Department of Physics
Royal Holloway, University of London
Egham Hill
TW20 0EX

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